'Alloying Contacts to Semiconductor Samples under Controlled Conditions

In assessing the quality of semiconductor materials and devices, measurements such as Resistivity, Hall mobility and DLTS are commonly used. These types of measurement require a reliable ohmic electrical contact to be made to the sample.

The Equipment

The alloy furnace comprises three parts, the reaction chamber, the optical observation system and the gas flow control unit which also houses the elctrical supplies.' The borosilicate furnace, which can heat up to 750C, is used to diffuse evaporated thin film contact metals into semiconductor layers.