University of Essex Nanofab

These pages provide an overview of the semiconductor device research and teaching nanofabrication facilities

References & Acknowledgements

Guide to Etching Techniques	Dr Geoff Hill (Senior Research Scientist, EPSRC III-V Semiconductor Central Facility, University of Sheffield) Device Fabrication EPSRC III-V Semiconductor Central Facility
Modern Gallium Arsenide Processing Techniques 2nd ed (Artech House 1990)	R.E.Williams
Semiconductors & Electronic Devices (Prentice Hall 1987)	Adir Bar-Lev
Introduction to Semiconductors	Bart J. Van Zeghbroeck, 1996, 1997
Semiconductor Integrated Circuit Processing Technology   Addison Wesley 1990	W.R.Runyan, K.E.Bean (Texas Instruments)
VLSI Fabrication Principles: Silicon & Gallium Arsenide John Wiley 1983	Sorab K. Gandhi
Semiconductor International http://209.67.253.149/ Cahners Publishing	The Industry's Source Book for Processing, Assembly & Testing
Solid State Technology PennWell Publishing	Worldwide Semiconductor Production
EuroPhotonics http://www.europhotonics.com/ Laurin Publishing	European coverage of product developments in optics, imaging, fibre optics, electro-optics and optoelectronics
Laser Focus World http://lfw.pennwellnet.com/home/home.cfm PennWell Publishing	Advances in Optics, Electro-optics, and Optoelctronics
Cleanrooms International http://cr.pennnet.com/home/home.cfm PennWell Publishing	The international magazine of contamination control technology
Growth and Characterisation of Semiconductors Adam Hilger 1990	ed.R.,A.Stradling & P.C.Klipstein

nanofab

These pages are written & maintained by Adrian Boland-Thoms